What We Offer

Precise fluid and motion control are critical across the entire semiconductor manufacturing process, and we have a wide range of solutions covering basic pneumatics to precision fluid control. At Norgren, we provide high precision products with outstanding performance - from valve islands, mass flow controllers, miniature proportional valves, media separated valves, to air preparation and actuators - and we assist customers in developing customised solutions to address their unique challenges.

Integrated Flow Control for Photolithography 

• Photolithography is one of the most essential steps in the semiconductor manufacturing process
• Patterns are optically imaged onto a silicon wafer using a high-energy UV laser focused on microscopic droplets of molten tin to produce a plasma
• This process is done within a vacuum to eliminate all potential airborne contaminates

Norgren offers an integrated flow control manifold solution which helps to flow purge gas through vacuum pumps to remove hazardous gases and by-products from the vacuum pump after each lithography cycle.
Thousands of Norgren solutions are being supplied to world-leading semiconductor OEMs globally, all backed by great technical and customer service to ensure stable supply.

Electronic Gas Control Solution

• Electronic gas is widely used in many semiconductor manufacturing processes
• Stable and Uninterrupted electronic gas supply is essential for a continuous semiconductor manufacturing process
• Disruption in gas supply could lead to unplanned line stop which may result in significant loss in production yield
• Some electronic gases are rare, expensive and/or hazardous, therefore minimum leakage is essential for chip manufacturers to save cost and to ensure health and safety

Norgren works closely with market-leading gas suppliers and chip manufacturers,  and offers customised solutions to ensure stable gas flow and smart solutions to detect leaks with a connected IIOT solution.